Air bearing positioning system accurate to 3 microns

With positional accuracy to within 3 microns for the standard version and better than 1 micron for the interferometer calibrated version, the AirGlide has a bidirectional repeatability of +/- 0.3 microns over a travel range of up to 1000 mm. The high-stiffness/ultra-smooth bearing system has a space saving shuttle design that features a high-speed linear brushless servomotor and perfectly suits precise velocity scanning as well as nanometre level step and repeat applications in high throughput production systems or research. A choice of sub-micron or nanometre resolution encoders in single axis or XY configurations from 150 mm to 1000 mm travel are available and AirGlide's impressive standard specifications include an acceleration capability to 5 m/s2, maximum velocity to 1 m/s and loads up to 40 kg. These application dependant values may be increased and can be adapted for specific customer requirements with Heason and Dover engineering support teams available to assist customers from initial design through to commissioning and beyond. The bearing system uses Dover's clog-free technology which provides good reliability whilst eliminating many costly filtration components and the non contact bearing and motor system combines for almost limitless life with extremely low maintenance.